Structural Investigation of AlN/SiOx Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering
Kawasaki, Masahiro, Nose, Masateru, Onishi, Ichiro, Shiojiri, MakotoVolume:
22
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927616000611
Date:
June, 2016
File:
PDF, 933 KB
english, 2016