AIP Conference Proceedings [Author(s) PHYSICS, TECHNOLOGIES AND INNOVATION (PTI-2018): Proceedings of the V International Young Researchers’ Conference - Ekaterinburg, Russia (14–18 May 2018)] - Surface profile sensor development
Tyshchenko, Igor, Popova, Mariia, Cherepanov, Alexander, Pesterev, Sergey, Bochkarev, YuriVolume:
2015
Year:
2018
Language:
english
DOI:
10.1063/1.5055181
File:
PDF, 1.06 MB
english, 2018