Origin of the dry etch damage in the short-channel oxide...

Thin Solid Films 2019 / 03 Vol. 674

Origin of the dry etch damage in the short-channel oxide thin-film transistors for high resolution display application

Choi, Ji Hun, Yang, Jong-Heon, Pi, Jae-Eun, Hwang, Chi-Young, Kim, Hee-Ok, Hwang, Chi-Sun
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Volume:
674
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.02.008
Date:
March, 2019
File:
PDF, 1.39 MB
2019
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