Wear Characteristics of Fluorocarbon Thin Films Deposited...

Journal of Nanoscience and Nanotechnology 2016 / 11 Vol. 16; Iss. 11

Wear Characteristics of Fluorocarbon Thin Films Deposited Using Inductively Coupled and Capacitively Coupled Plasma Methods

Cho, Youn-Jeong, Jang, Yun Jung, Han, Seunghee, Lee, Yeonhee
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Volume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.13535
Date:
November, 2016
File:
PDF, 385 KB
english, 2016
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