Fabrication and optical characterization of pedestal micro-structures on DUV210 polymer: waveguides structures towards micro-resonators
Specht, Marion, Huby, Nolwenn, Lhermite, Hervé, Castro-Beltran, Rigoberto, Loas, Goulchen, Bêche, BrunoVolume:
71
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2015150207
Date:
July, 2015
File:
PDF, 523 KB
english, 2015