[IEEE 2018 7th Electronic System-Integration Technology Conference (ESTC) - Dresden (2018.9.18-2018.9.21)] 2018 7th Electronic System-Integration Technology Conference (ESTC) - Additive Manufacturing of Micro-scale Tunnels on a Silicon Substrate with in-situ UV LED Curing for MEMS Applications
Lee, Shi-Wei Ricky, Xu, Qianwen, Lo, Jeffery Chi ChuenYear:
2018
DOI:
10.1109/ESTC.2018.8546382
File:
PDF, 7 KB
2018