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Fabrication and characterization of a SU-8 epoxy membrane based thermopile detector with an integrated multilayered absorber structure for the mid-IR region
Asharf, Shakeel, Mattsson, Claes G., Thungstrom, GoranYear:
2019
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2019.2896668
File:
PDF, 6 KB
english, 2019