Electromagnetic silicon MEMS resonator
Watanabe, Yoshiyuki, Yahagi, Toru, Abe, Yutaka, Murayama, HirokiVolume:
206
Language:
english
Journal:
Electrical Engineering in Japan
DOI:
10.1002/eej.23154
Date:
January, 2019
File:
PDF, 1.13 MB
english, 2019