Thickness dependence of Al0.88Sc0.12N thin films grown on...

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Thin Solid Films 2019 / 2

Thickness dependence of Al0.88Sc0.12N thin films grown on silicon

Knisely, Katherine, Douglas, Erica, Mudrick, John, Rodriguez, Mark, Kotula, Paul
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Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.02.023
Date:
February, 2019
File:
PDF, 7.35 MB
2019
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