Development of an Environmentally Conscious Carbon Thin...

Development of an Environmentally Conscious Carbon Thin Films

YASUI, Haruyuki, TAKI, Makoto, HASEGAWA, Yuuji, TAKAGO, Shigeki
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Volume:
53
Year:
2010
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.53.30
File:
PDF, 1.17 MB
2010
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