Characterization of the nature of shear-induced...

Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries

Khanna, Aniruddh J., Chang, Feng-Chi, Gupta, Sushant, Kumar, Purushottam, Singh, Rajiv K.
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5065516
Date:
January, 2019
File:
PDF, 1.59 MB
english, 2019
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