Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 01 Vol. 37; Iss. 1
Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries
Khanna, Aniruddh J., Chang, Feng-Chi, Gupta, Sushant, Kumar, Purushottam, Singh, Rajiv K.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5065516
Date:
January, 2019
File:
PDF, 1.59 MB
english, 2019