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Texture and phase variation of ALD PbTiO 3 films crystallized by rapid thermal anneal
Strnad, Nicholas A., Potrepka, Daniel M., Pulskamp, Jeffrey S., Liu, Yang, Jones, Jacob L., Phaneuf, Raymond J., Polcawich, Ronald G.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5080226
Date:
March, 2019
File:
PDF, 2.56 MB
english, 2019