![](/img/cover-not-exists.png)
Characterization of transport of Titanium neutral atoms sputtered in Ar and Ar/N2 HIPIMS discharges
EL FARSY, Abderzak, Ledig, Jordan, Desecures, Mikael, Bougdira, Jamal, de Poucques, LudovicJournal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab022b
Date:
January, 2019
File:
PDF, 1.45 MB
2019