Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition
Lei, Yu, Jiang, Jinlong, Wang, Yubao, Bi, Tiantian, Zhang, LijuanLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.02.063
Date:
February, 2019
File:
PDF, 1.21 MB
english, 2019