AIP Conference Proceedings [AIP The fourteenth international conference on the application of accelerators in research and industry - Denton, Texas (USA) (6-9 Nov 1996)] - High sensitivity impurity measurements in semiconductors using trace-element accelerator mass spectrometry (TEAMS)
Datar, S. A., Zhao, Z. Y., Renfrow, S. N., Guo, B. N., Anthony, J. M., McDaniel, F. D.Year:
1997
DOI:
10.1063/1.52568
File:
PDF, 838 KB
1997