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An experimental test-stand for investigation of electron-beam synthesis of dielectric coatings in medium vacuum pressure range
Tyunkov, A.V., Burdovitsin, V.A., Oks, E.M., Yushkov, Yu.G., Zolotukhin, D.B.Volume:
163
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.02.010
Date:
May, 2019
File:
PDF, 1.88 MB
english, 2019