Realtime in-plane displacements tracking of the precision...

Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision

Li, Hai, Zhu, Benliang, Chen, Zhong, Zhang, Xianmin
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Volume:
124
Language:
english
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2019.01.046
Date:
June, 2019
File:
PDF, 1.94 MB
english, 2019
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