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Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.Volume:
9
Journal:
Scientific Reports
DOI:
10.1038/s41598-019-38847-6
Date:
December, 2019
File:
PDF, 2.96 MB
2019