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Backscattered electron detector for 3D microstructure visualization in scanning electron microscopy
Rau, E. I., Karaulov, V. Yu., Zaitsev, S. V.Volume:
90
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5054746
Date:
February, 2019
File:
PDF, 4.73 MB
english, 2019