Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C
Du, Lidong, Zhao, Zhan, Fang, Zhen, Feng, Yu, Yan, JizeVolume:
11
Language:
english
Journal:
IET Science, Measurement & Technology
DOI:
10.1049/iet-smt.2017.0057
Date:
October, 2017
File:
PDF, 8 KB
english, 2017