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[IEEE 2018 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2018.12.1-2018.12.5)] 2018 IEEE International Electron Devices Meeting (IEDM) - Development of X-ray Photoelectron Spectroscopy under bias and its application to determine band-energies and dipoles in the HKMG stack
Kumar, Pushpendra, Leroux, Charles, Domengie, Florian, Martinez, Eugenie, Loup, Virginie, Guiheux, Denis, Morand, Yves, Pedini, Jean-Michel, Tabone, Claude, Gaillard, Frederic, Ghibaudo, GerardYear:
2018
DOI:
10.1109/iedm.2018.8614554
File:
PDF, 5 KB
2018