Submicrometer Top-Gate Self-Aligned a-IGZO TFTs by...

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IEEE Transactions on Electron Devices 2019

Submicrometer Top-Gate Self-Aligned a-IGZO TFTs by Substrate Conformal Imprint Lithography

Ram, Mamidala Saketh, de Kort, Laura, de Riet, Joris, Verbeek, Roy, Bel, Thijs, Gelinck, Gerwin, Kronemeijer, Auke Jisk
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Year:
2019
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2019.2898255
File:
PDF, 7 KB
2019
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