Characterization of amorphous carbon films by PECVD and...

Materials Chemistry and Physics 2019 / 04 Vol. 227

Characterization of amorphous carbon films by PECVD and plasma ion implantation: The role of fluorine and sulfur doping

de Oliveira Neto, Antonio M., Schreiner, Wido H., Justo, João F., de Oliveira, Alexandre M., Rangel, Elidiane C., Durrant, Steven F.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
227
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2019.02.008
Date:
April, 2019
File:
PDF, 1000 KB
english, 2019
Conversion to is in progress
Conversion to is failed