Impact of charged species transport coefficients on...

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Plasma Sources Science and Technology 2019 / 02

Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Orlac'h, Jean-Maxime, Novikova, Tatiana, Giovangigli, Vincent, Johnson, Erik V, Roca i Cabarrocas, Pere
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab067d
Date:
February, 2019
File:
PDF, 2.69 MB
english, 2019
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