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[IEEE 2018 IEEE Photonics Conference (IPC) - Reston, VA (2018.9.30-2018.10.4)] 2018 IEEE Photonics Conference (IPC) - Improvement of Sidewall Roughness of Submicron SOI Waveguides by Hydrogen Plasma and Annealing
Bellegarde, Cyril, Pargon, Erwine, Sciancalepore, Corrado, Petit-Etienne, Camille, Hugues, Vincent, Robin-Brosse, Daniel, Hartmann, Jean-Michel, Lyan, PhilippeYear:
2018
Language:
english
DOI:
10.1109/ipcon.2018.8527221
File:
PDF, 6 KB
english, 2018