Correlating structural and mechanical properties of AlN/TiN...

Scripta Materialia 2019 / 05 Vol. 165

Correlating structural and mechanical properties of AlN/TiN superlattice films

Koutná, Nikola, Řehák, Petr, Chen, Zhuo, Bartosik, Matthias, Fallmann, Markus, Černý, Miroslav, Zhang, Zaoli, Friák, Martin, Šob, Mojmír, Mayrhofer, Paul H., Holec, David
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Volume:
165
Journal:
Scripta Materialia
DOI:
10.1016/j.scriptamat.2019.02.021
Date:
May, 2019
File:
PDF, 943 KB
2019
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