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Microsystem Technologies 2019 / 2

Design and optimization of heating plate for metal oxide semiconductor gas sensor

Wu, Yi, Yuan, Lijing, Hua, Zhongqiu, Zhen, Dong, Qiu, Zhilei
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04318-1
Date:
February, 2019
File:
PDF, 2.82 MB
2019
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