Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF 6 -added plasma etching of quartz glass
Nguyen, Thi-Thuy-Nga, Sasaki, Minoru, Odaka, Hidefumi, Tsutsumi, Takayoshi, Ishikawa, Kenji, Hori, MasaruVolume:
125
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5081875
Date:
February, 2019
File:
PDF, 3.23 MB
english, 2019