Toward epitaxial ternary oxide multilayer device stacks by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 03 Vol. 37; Iss. 2

Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition

King, Peter J., Vehkamäki, Marko, Mattinen, Miika, Heikkilä, Mikko J., Mizohata, Kenichiro, Noh, Wontae, Leskelä, Markku, Ritala, Mikko
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5081997
Date:
March, 2019
File:
PDF, 1.17 MB
english, 2019
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