Capacitively coupled plasma-stimulated room-temperature Mg...

Applied Physics 2019 / 3 Vol. 125; Iss. 3

Capacitively coupled plasma-stimulated room-temperature Mg and Mn doping and electrical activation in GaAs

Li, Lei, Zhihao, Zang, Ma, Nongnong, He, Youqin, Chen, Xiao, Xu, Wanjin, Fengpo, Yuan, Qin, G. G.
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Volume:
125
Journal:
Applied Physics A
DOI:
10.1007/s00339-019-2522-z
Date:
March, 2019
File:
PDF, 806 KB
2019
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