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Thickness dependence of Al0.88Sc0.12N thin films grown on silicon
Knisely, Katherine, Douglas, Erica, Mudrick, John, Rodriguez, Mark, Kotula, PaulLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.02.023
Date:
February, 2019
File:
PDF, 7.35 MB
english, 2019