Low temperature activation of amorphous In-Ga-Zn-O...

AIP Advances 2019 / 02 Vol. 9; Iss. 2

Low temperature activation of amorphous In-Ga-Zn-O semiconductors using microwave and e-beam radiation, and the associated thin film transistor properties

Jang, Seong Cheol, Park, Jozeph, Kim, Hyoung-Do, Hong, Hyunmin, Chung, Kwun-Bum, Kim, Yong Joo, Kim, Hyun-Suk
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Volume:
9
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5082862
Date:
February, 2019
File:
PDF, 2.49 MB
english, 2019
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