Sensitivity of Micro Cantilever Mass Sensor Transduced by...

IEEJ Transactions on Sensors and Micromachines 2007 Vol. 127; Iss. 3

Sensitivity of Micro Cantilever Mass Sensor Transduced by PZT Film

Lu, Jian, Ikehara, Tsuyoshi, Konno, Mitsuo, Maeda, Ryutaro, Mihara, Takashi
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Volume:
127
Year:
2007
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.127.126
File:
PDF, 567 KB
2007
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