Properties and Applications of Silicon Carbide || Growth...

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Properties and Applications of Silicon Carbide || Growth Rate Enhancement of Silicon-Carbide Oxidation in Thin Oxide Regime

Gerhardt, Rosario
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Volume:
10.5772/61
Year:
2011
Language:
english
DOI:
10.5772/14591
File:
PDF, 406 KB
english, 2011
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