Residual Stress in Lithium Niobate Film Layer of LNOI/Si...

Micromachines 2019 / 02 Vol. 10; Iss. 2

Residual Stress in Lithium Niobate Film Layer of LNOI/Si Hybrid Wafer Fabricated Using Low-Temperature Bonding Method

Takigawa, Ryo, Tomimatsu, Toru, Higurashi, Eiji, Asano, Tanemasa
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Volume:
10
Journal:
Micromachines
DOI:
10.3390/mi10020136
Date:
February, 2019
File:
PDF, 2.88 MB
2019
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