Low resistivity Ru1-xTixO2 thin films deposited by hybrid...

Thin Solid Films 2019 / 04 Vol. 676

Low resistivity Ru1-xTixO2 thin films deposited by hybrid high-power impulse magnetron sputtering and direct current magnetron sputtering technique

Sandu, C.S., Magrez, A., Karimi, A., Sanjinés, R.
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Volume:
676
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.03.005
Date:
April, 2019
File:
PDF, 1.04 MB
2019
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