Surface electrical characterization of defect related...

Materials Science in Semiconductor Processing 2019 / 05 Vol. 94

Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy

Szyszka, Adam, Wośko, Mateusz, Paszkiewicz, Bogdan, Paszkiewicz, Regina
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Volume:
94
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.01.043
Date:
May, 2019
File:
PDF, 3.32 MB
english, 2019
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