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[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - A Two-Axis MEMS Piezoresistive In-Plane Accelerometer with Pure Axially Deformed Microbeams
Yu, Mingzhi, Zhao, Libo, Jiang, Weile, Jia, Chen, Li, Zhikang, Zhao, Yulong, Jiang, ZhuangdeYear:
2018
Language:
english
DOI:
10.1109/ICSENS.2018.8589746
File:
PDF, 7 KB
english, 2018