Influence of temperature on atomic layer epitaxial growth...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 05 Vol. 37; Iss. 3

Influence of temperature on atomic layer epitaxial growth of indium nitride assessed with in situ grazing incidence small-angle x-ray scattering

Woodward, Jeffrey M., Rosenberg, Samantha G., Kozen, Alexander C., Nepal, Neeraj, Johnson, Scooter D., Wagenbach, Christa, Rowley, Andrew H., Robinson, Zachary R., Joress, Howie, Ludwig, Karl F., Eddy
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Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5081919
Date:
May, 2019
File:
PDF, 2.37 MB
2019
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