Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 03 Vol. 37; Iss. 2
Lithium ion beams from liquid metal alloy ion sources
Pilz, Wolfgang, Klingner, Nico, Bischoff, Lothar, Mazarov, Paul, Bauerdick, SvenVolume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5086271
Date:
March, 2019
File:
PDF, 1.75 MB
2019