Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
Sandu, Cosmin Silviu, Parsapour, Fazel, Mertin, Stefan, Pashchenko, Vladimir, Matloub, Ramin, LaGrange, Thomas, Heinz, Bernd, Muralt, PaulVolume:
216
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201800569
Date:
January, 2019
File:
PDF, 8.81 MB
english, 2019