X-Ray Stress Measurement of Silicon Single Crystal.

X-Ray Stress Measurement of Silicon Single Crystal.

SUZUKI, Hiroshi, AKITA, Koichi, MISAWA, Hiroshi
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Volume:
49
Year:
2000
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.49.534
File:
PDF, 1.83 MB
2000
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