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A Study on EEM(Elastic Emission Machining) - Influences of Dissolved Oxygen to Si Wafer Surface.
YAMAUCHI, Kazuto, KATAOKA, Toshihiko, ENDO, Katsuyoshi, INAGAKI, Kouji, SUGIYAMA, Kazuhisa, MAKINO, Syuji, MORI, YuzoVolume:
64
Year:
1998
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.64.907
File:
PDF, 1.59 MB
1998