Incorporation of Phosphorus Impurities in a Silicon...

Micromachines 2019 / 02 Vol. 10; Iss. 2

Incorporation of Phosphorus Impurities in a Silicon Nanowire Transistor with a Diameter of 5 nm

Jiang, Yanfeng, Wang, Wenjie, Wang, Zirui, Wang, Jian-Ping
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Volume:
10
Journal:
Micromachines
DOI:
10.3390/mi10020127
Date:
February, 2019
File:
PDF, 1.87 MB
2019
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