Measurements of Outgassing Rates in a Field of Analysis

Measurements of Outgassing Rates in a Field of Analysis

HIRASHITA, Norio, URANO, Makoto, YOSHIDA, Hajime
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Volume:
57
Year:
2014
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.57.214
File:
PDF, 726 KB
2014
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