A Customized Nonlinear Micro-Flexure for Extending the...

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Journal of Microelectromechanical Systems 2019

A Customized Nonlinear Micro-Flexure for Extending the Stable Travel Range of MEMS Electrostatic Actuator

Xiang, Xiaojian, Dai, Xuhan, Wang, Kai, Yang, Zhuoqing, Sun, Yunna, Ding, Guifu
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Year:
2019
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2019.2894669
File:
PDF, 10 KB
english, 2019
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