Preparation of Oriented PZT Thin Films and the...

IEEJ Transactions on Sensors and Micromachines 2007 Vol. 127; Iss. 12

Preparation of Oriented PZT Thin Films and the Applications to Micro Piezoelectric Devices

Takayama, Ryoichi, Fujii, Eiji, Kamada, Takeshi, Murata, Akiko, Hirasawa, Taku, Tomozawa, Atsushi, Fujii, Satoru, Torii, Hideo, Nomura, Koji
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Volume:
127
Year:
2007
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.127.553
File:
PDF, 1.10 MB
english, 2007
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