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Structure and Thermal Stability of the Chemical Bondings of Diamond-Like Carbon (DLC) Films Prepared by RF Magnetron Sputtering
MIKAMI, Takamasa, NAKAZAWA, Hideki, ENTA, Yoshiharu, SUEMITSU, Maki, MASHITA, MasaoVolume:
24
Year:
2003
Journal:
Hyomen Kagaku
DOI:
10.1380/jsssj.24.411
File:
PDF, 332 KB
2003