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New Laser Slicing Technology of SiC Ingot
HIRATA, Kazuya, YAMAMOTO, Ryohei, NISHINO, Yoko, MURAZAWA, Naoki, TAKAHASHI, KunimitsuVolume:
83
Year:
2017
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.83.829
File:
PDF, 1.19 MB
2017