Ultraprecision Diameter Measurement of Small Holes with...

Applied Sciences 2019 / 01 Vol. 9; Iss. 2

Ultraprecision Diameter Measurement of Small Holes with Large Depth-To-Diameter Ratios Based on Spherical Scattering Electrical-Field Probing

Bian, Xingyuan, Cui, Junning, Lu, Yesheng, Tan, Jiubin
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Volume:
9
Language:
english
Journal:
Applied Sciences
DOI:
10.3390/app9020242
Date:
January, 2019
File:
PDF, 8.35 MB
english, 2019
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